Hot Plate Oven and VCD Unit - GROUP UP INDUSTRIAL CO., LTD
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Hot Plate Oven and VCD Unit

Hot Plate Oven and VCD Unit

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High temperature uniformity, easy to be integrated into EFEM system
Accommodate robot handling

Features

  1. Single panel process
  2. Pre-heat or post-cure to cope with different process
  3. High temperature uniformity
  4. Additional cold plate to increase panel cooling speed

 

Safety audit

  1. Comply to SEMI S2, S8 standards
  2. Comply to CE, UL standards

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