Features
- Exposure energy adjustable
- Panel cooling system
- Energy compensation can extend lamp lifetime
- Applicable to single/double-sided
Automation
- Comply with SECS/GEM standards
- Load and unload panels by EFEM
- Capable of handling 0.2-3mm glass panel
Safety audit
- Comply to SEMI S2, S8 standards
- Comply to CE, UL standards