Features
- Applied to lamination process on CCL and glass panel
- Applied to DFR, Protective-film, PET-film lamination process
- Defect free, no wrinkles and bubbles
Automation
- Load and unload panels by EFEM
- Recipe selections and records saved in tool PC
- Comply with SECS/GEM standards
Accuracy
- Aligned by CCD-camera assist system
- Leading and trailing edge can reach +/-1mm accuracy
Panel Handling
- No scratches on glass panel by soft material contact
- No scratches and cracks on 200um glass
Safety audit
- Comply to SEMI S2, S8 standards
- Comply to CE, UL standards
